US20160324478A1_page_44

US20160324478A1 | page 44 | https://thedailydialectics.com/pdfs/wipow/US20160324478A1/US20160324478A1.pdf

US20160324478A1 | page 44 | https://thedailydialectics.com/pdfs/wipow/US20160324478A1/US20160324478A1.pdf

US 2016/0324478 Al state electrical devices, such as MEMS devices, thin film bulk acoustic resonators (FBARs), surface-acoustic wave (SAW) devices, or the like. These compact solid state components may be arrayed, each arrayed element having a different selective coating, for monitoring various…

StatesPatentApplicationPublication2016/0324478Goldstein(43)Date:2016(54)
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