
US20160324478A1 | page 44 | https://thedailydialectics.com/pdfs/wipow/US20160324478A1/US20160324478A1.pdf
US 2016/0324478 Al state electrical devices, such as MEMS devices, thin film bulk acoustic resonators (FBARs), surface-acoustic wave (SAW) devices, or the like. These compact solid state components may be arrayed, each arrayed element having a different selective coating, for monitoring various…