thermal_actuator_SAND-1_page_7

thermal | actuator SAND-1 page 7 | https://thedailydialectics.com/pdfs/thermal_actuator_SAND-1/thermal_actuator_SAND-1.pdf

1. Introduction MEMS motion and actuation has traditionally been achieved electrostatically using comb- drive or parallel-plate actuation techniques. While successful, this actuation method typically provides a small force per unit area and requires a high actuation voltage. Surface micromachined…