thermal_actuator_SAND-1_page_38

thermal | actuator SAND-1 page 38 | https://thedailydialectics.com/pdfs/thermal_actuator_SAND-1/thermal_actuator_SAND-1.pdf

[27] L. Que, L. Otradovec, A.D. Oliver and Y.B. Gianchandani, “Pulse and DC operation 28] 29] 30] 31] 32] 33] lifetimes of bent-beam electrothermal actuators,” Technical digest, MEMS2001, 1 4h IEEE International Conference on Microelectromechanical Systems, pp. 570-573, Interlaken, Switzerland,…