thermal_actuator_SAND-1_page_37

thermal | actuator SAND-1 page 37 | https://thedailydialectics.com/pdfs/thermal_actuator_SAND-1/thermal_actuator_SAND-1.pdf

8] 9] 10] 11] 12] 13] 14] 15] 16] 17] 18] 19] 20] 21] 22] 23] 24] 25] 26] L.Que, J.S. Park, Y.B. Gianchandani, "Bent-beam electrothermal actuators - Part I: Single beam and cascaded devices," Journal of Microelectromechanical Systems, 10 (2), pp. 247-254, 2001. J.S. Park, L.L. Chu, A.D. Oliver,…