thermal_actuator_SAND-1_page_30

thermal | actuator SAND-1 page 30 | https://thedailydialectics.com/pdfs/thermal_actuator_SAND-1/thermal_actuator_SAND-1.pdf

Figure 3-6: a) Optical image of actuator after continuous operation in air at 50% relative humidity for six days at ~600° C maximum leg temperature. b) TEM showing oxide growth at hottest part of an actuator leg and c) cross-section of same actuator taken near the anchor where the polysilicon does…