thermal_actuator_SAND-1_page_3

thermal | actuator SAND-1 page 3 | https://thedailydialectics.com/pdfs/thermal_actuator_SAND-1/thermal_actuator_SAND-1.pdf

SAND2004-6635 Unlimited Release Printed December 2004 Final Report: Compliant Thermo-Mechanical MEMS Actuators LDRD #52553 Michael S. Baker MEMS Device Technologies Richard A. Plass Radiation and Reliability Physics Thomas J. Headley Materials Characterization Department Jeremy A. Walraven Failure…