thermal_actuator_SAND-1_page_15

thermal | actuator SAND-1 page 15 | https://thedailydialectics.com/pdfs/thermal_actuator_SAND-1/thermal_actuator_SAND-1.pdf

WwW] Cross-section ¢————_ \t—>| 13 W2 i) ty NS [2 Substrate Figure 2-3: Illustration showing dimension labels for SUMMIT actuator designs. Displacement and resistance measurements were collected at three locations on the wafer and the measurements were repeatable to better than the measurement…