thermal_actuator_SAND-1_page_10

thermal | actuator SAND-1 page 10 | https://thedailydialectics.com/pdfs/thermal_actuator_SAND-1/thermal_actuator_SAND-1.pdf

SUMMiT V™ polysilicon being highly n-type doped. Its resistivity was measured using standard van der Pauw sheet-resistance structures [15,16] from room temperature up to 550° C for all three of the primary structural layers (Poly1/2 laminate, poly3 and poly4). A curve fit of this data, averaged…