thermal_actuator_SAND-1_page_1

thermal | actuator SAND-1 page 1 | https://thedailydialectics.com/pdfs/thermal_actuator_SAND-1/thermal_actuator_SAND-1.pdf

SANDIA REPORT SAND2004-6635 Unlimited Release Printed December 2004 Final Report: Compliant Thermo- Mechanical MEMS Actuators LDRD #52553 Michael S. Baker, Richard A. Plass, Thomas J. Headley, Jeremy A. Walraven Prepared by Sandia National Laboratories Albuquerque, New Mexico 87185 and Livermore,…