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SANDIA REPORT SAND2004-6635 Unlimited Release Printed December 2004 Final Report: Compliant Thermo- Mechanical MEMS Actuators LDRD #52553…
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SUMMiT V™ polysilicon being highly n-type doped. Its resistivity was measured using standard van der Pauw sheet-resistance structures…
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a, = (3.725x(I-exp(—5.88x 107 (7 -125)))+(5.548x10~)T)x10° Eq. 2-4 where the temperature is given in Kelvin [19]. To calculate the total…
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An equation for each of the heat transfer terms shown in Figure 2-1 can be written as follows k A(T, -T. 4, he GiTn) bq. 2-6 x k A(T, -T,…
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2.2.1. Thermal conduction shape-factor The technique for modeling the heat transfer in a thermal actuator beam is a 1-dimensional solution…
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structural response. Material stresses, displacements and output forces can all be obtained from the FEA solution. The output force of a…
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WwW] Cross-section ¢————_ \t—>| 13 W2 i) ty NS [2 Substrate Figure 2-3: Illustration showing dimension labels for SUMMIT actuator designs.…
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Displacement Comparison Displacement (microns) Applied Current (mA) Resistance Comparison Actuator Resistance (ohms) Applied Current (mA)…
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Actuator displacement scale Force-gauge spring Force-gauge ee displacement ! scale Pull-ring for Support and f [ probe tip guide springs…
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actuated at a constant 15 mA at 6.1 V. There are two predicted curves for the force output, illustrating an important consideration when…
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Temperature Validation 5 : : re : ' = 1 > 1 1 s \ 1 £ i i o i i 2 : ' £ y i 1 3 i i i F ' I ' ! 100 | ---gfu eee eee lee eee eee…
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Issued by Sandia National Laboratories, operated for the United States Department of Energy by Sandia Corporation. NOTICE: This report was…
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NI Vision pattern matching routines to determine the displacement of the thermal actuator shuttle relative to a fixed reference point in…
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Shuttle displacements were obtained using National Instruments Vision image analysis software routines [30]. The routines can resolve…
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based on our model predictions. Beyond this power level this particular actuator begins to plastically deform, as seen in the flattening of…
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where R is the device degradation rate with time, A is a constant we will call the prefactor, k is Boltzmann’s constant (8.617x10° eV / K),…
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The long term reliability testing was designed to ensure that the maximum temperature of each thermal actuator was as constant as possible…
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A-Zoom Microscope Gantry, Test PC Boards ‘A-Zoom ' \ Microscope Objective , .) Lens + 25
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Displacement and effective resistance data collection was much like the procedure discussed in the short term test section where National…
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air conditions and higher power levels. One to ten hour measurement intervals were typical for the SHiMMeR based tests. The test at ~ 546°…
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Table 3-2: Plastic deformation rate activation energies — microns/day Rest Condition Actuated Condition Activation | Std. In Std.…
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Plastic Def. Rates vs. Max. Leg Temp. "Cold" Condition Changes 1.6 T T _ f ' 144 Loaded Dry i 7-4 - - - -Unloaded Dry ' ' 12 7 Loaded Wet…
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SAND2004-6635 Unlimited Release Printed December 2004 Final Report: Compliant Thermo-Mechanical MEMS Actuators LDRD #52553 Michael S. Baker…
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Figure 3-6: a) Optical image of actuator after continuous operation in air at 50% relative humidity for six days at ~600° C maximum leg…
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Resistance Change Rates vs. Temperature -- Dry }----4-------1------- 1000 T 900 + + 800 + Wet | ___ Sealed (Resistance Change)*2/Time…
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vary the width of the leg along its length in a way that balances shuttle displacement / force output with a more even temperature…
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3.2.3. Cycling Experiments The short term high power discovery experiments showed thermal actuators can generate a significant amount of…
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guide structures had a lower likelihood of generating wear debris. But the cause of abnormal downward device deflection during actuation…
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the device under test. In both instances, the maximum pulse is delivered within the first 5 — 25 ns (5 — 10 ns for MM and 15 — 25 ns for…
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coupled with the validated modeling capabilities, this allows for reliability to be designed into an actuator from the beginning. 4.1.…
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8] 9] 10] 11] 12] 13] 14] 15] 16] 17] 18] 19] 20] 21] 22] 23] 24] 25] 26] L.Que, J.S. Park, Y.B. Gianchandani, "Bent-beam electrothermal…
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[27] L. Que, L. Otradovec, A.D. Oliver and Y.B. Gianchandani, “Pulse and DC operation 28] 29] 30] 31] 32] 33] lifetimes of bent-beam…
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conditions. The results from this study have been used to determine a maximum reliable operating temperature that, when used in conjunction…
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Contents 1. Introduction 1.1. | Thermal actuator designs . 2. Model Development...…
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Figure 2-8: Plot of modeled temperatures vs. measured temperature using Raman IMICTOSCOPE:.…
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1. Introduction MEMS motion and actuation has traditionally been achieved electrostatically using comb- drive or parallel-plate actuation…
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Movable f Direction of motion Anchored shuttle contact pad Na Heated Heated beams beams | Applied voltage Figure 1-2: Illustration of V…
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and decreased leg offset angle. The displacement is insensitive to the cross-sectional area of the legs and is not affected by the number…