Microresonator-Overview-1_page_7

Microresonator-Overview-1 | page 7 | https://thedailydialectics.com/pdfs/mems/Microresonator-Overview-1/Microresonator-Overview-1.pdf

Temperature Compensation (he. 2 ; l | sAC=50C -10 “15 -20 a * 30 a i -35 = “ Sp Ring Resonator Filters -45 -50 -55 L vera Electrodes Aluminum Nitride aoa 202 202-8 202 202.5 203 203.5 Conaporection Layer Acoustic Wave Propagation 6 AC = 60 C ; -10 i rarer = se ees ie Resonator Cross-Section ‘s _…