Microresonator-Overview-1_page_2

Microresonator-Overview-1 | page 2 | https://thedailydialectics.com/pdfs/mems/Microresonator-Overview-1/Microresonator-Overview-1.pdf

Sandia National Microresonator Technology ae Silicon Wafer Scale Package Lid Microresonators are miniature, high quality factor acoustic resonators that: > Are mass produced using CMOS smn IC fabrication techniques > Are lithographically defined, allowing any resonant frequency between 32 kHz and…

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