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Microresonator-Overview-1
Microresonator-Overview-1
Microresonator-Overview-1_page_1
Sandia Exceptional service in the national interest ("h) National Laboratories | Using a lial i -80 — i 400 420 440 460 480 500 520 540 560…
Microresonator-Overview-1_page_10
Thermal Stability Low Power, High Stability Frequency References « Record Low Ovenization Power of 92 CimW ¢ Low Power Ovenized Oscillators…
Microresonator-Overview-1_page_2
Sandia National Microresonator Technology ae Silicon Wafer Scale Package Lid Microresonators are miniature, high quality factor acoustic…
Microresonator-Overview-1_page_3
¢ Filter Banks for Cognitive and Multi-Band 10, * 16- Radios 20. Channels “ * 4dBLL ee * 1.3 MHz BW ¢ Anti-Jam and Secure Adaptive RF…
Microresonator-Overview-1_page_4
CMOS/Filter Integration — * Integration with Electronic Switches for Reconfigurable RF Components * Diode, Data Converter and Log Amp…
Microresonator-Overview-1_page_5
Wafer Level Packaging Se Packaged AIN MEMS Devices Packaged Surface Mount AIN Filter on a PCB = Chip and Wire =e" AIN MEMS Die
Microresonator-Overview-1_page_6
VHF/UHF Filters ¢ Size of Surface and Bulk Acoustic Wave Filters ~ 1/Frequency2 ¢ Size of Microresonator Filters ~ 1/Frequency ¢* Below 500…
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Temperature Compensation (he. 2 ; l | sAC=50C -10 “15 -20 a * 30 a i -35 = “ Sp Ring Resonator Filters -45 -50 -55 L vera Electrodes…
Microresonator-Overview-1_page_8
Filter Cross-Talk * Cross-Talk Between Filters in the Same Wafer Level Package Less Than 0.5 mm Apart is > 55 dB Ls i i ‘ E TC MN IAL…
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Sandia Thin Clocks and Oscillators — 532 MHz > High-Q Factor Resonators in Wafer Level aN Micro Packages with Thicknesses < 200 um >…